
ALEXi
Full-frame deep cooling scientific CCD camera for Imaging applications

ALEX for Imaging
High resolution up to 16.8 Megapixel
ALEXi integrates cutting-edge low-noise electronics and ultra-deep cooling technology while keeping a compact camera design. Multiple readout speeds can be selected supporting pixel rates from 50 kHz up to 5 MHz.
True 18-bit AD conversion allows to exploit the full dynamic range of the CCD sensor for highest performance and SNR. ALEXi is ideally suited for detection of very weak signal intensities where a low-noise floor is paramount.
ALEXi offers unprecedented possibilities for your measurements of tomorrow.
Typical Applications
- - EUV Lithography
- - X-Ray Tomography
- - Fourier Transform Holography
- - X-Ray Fluoroscopy
- - Coherent Diffraction Imaging
- - Ptychographic Spectromicroscopy
- - Grazing-Incidence Small-Angle X-Ray Scattering
Models
ALEXi 1k1k

| Image Area | 13.3 mm × 13.3 mm |
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| Pixel Format | 1024 × 1024 (FI) / 1056 × 1027 (others) pixels |
| Pixel Size | 13 µm × 13 µm |
| CCD Sensor Cooling | Min. -100°C to 20°C, forced air or liquid cooling |
| Distance Flange - Focal Plane | 6 mm with CF DN63 flange |
| Dimensions (W x H x L) | 8.3 cm × 10.0 cm × 10.9 cm (3.27ʺ × 3.94ʺ × 4.29ʺ) |
| Weight | 2.9 kg (with CF DN63 flange) |
CCD Sensor Types
ALEXi 1k1k BI | ALEXi 1k1k BI DD | ALEXi 1k1k BI UV1 | ALEXi 1k1k FI |
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| EUV, HXR, SXR, VUV | EUV, HXR, SXR, VUV | EUV, HXR, SXR, VUV | HXR, SXR |
ALEXi 2k2k

| Image Area | 27.6 mm × 27.6 mm |
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| Pixel Format | 2048 × 2052 pixels |
| Pixel Size | 13.5 µm × 13.5 µm |
| CCD Sensor Cooling | Min. -90°C to 20°C, forced air or liquid cooling |
| Distance Flange - Focal Plane | 5 mm with CF DN63 flange |
| Dimensions (W x H x L) | 8.3 cm × 10.0 cm × 10.9 cm (3.27ʺ × 3.94ʺ × 4.29ʺ) |
| Weight | 2.9 kg (with CF DN63 flange) |
CCD Sensor Types
ALEXi 2k2k BI | ALEXi 2k2k BI DD | ALEXi 2k2k BI UV1 | ALEXi 2k2k FI | ALEXi 2k2k plus BI |
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| EUV, HXR, SXR, VUV | EUV, HXR, SXR, VUV | EUV, HXR, SXR, VUV | HXR, SXR | EUV, HXR, SXR, VUV |
ALEXi 2k2k plus

| Image Area | 30.7 mm × 30.7 mm |
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| Pixel Format | 2048 × 2064 pixels |
| Pixel Size | 15 µm × 15 µm |
| CCD Sensor Cooling | Min. -90°C to 20°C, forced air or liquid cooling |
| Distance Flange - Focal Plane | 6 mm with CF DN63 flange |
| Dimensions (W x H x L) | 13.7 cm × 13.7 cm × 13.3 cm (5.39ʺ × 5.39ʺ × 5.24ʺ) |
| Weight | 12.5 kg |
CCD Sensor Types
ALEXi 2k2k plus BI |
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| EUV, HXR, SXR, VUV |
ALEXi 4k4k

| Image Area | 61.4 mm × 61.7 mm |
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| Pixel Format | 4096 × 4096 pixels |
| Pixel Size | 15 μm × 15 μm |
| CCD Sensor Cooling | Min. -90°C to 20°C, forced air or liquid cooling |
| Distance Flange - Focal Plane | 27 mm |
| Dimensions (W x H x L) | 13.7 cm × 13.7 cm × 13.3 cm (5.39ʺ × 5.39ʺ × 5.24ʺ) |
| Weight | 12.5 kg |
CCD Sensor Types
ALEXi 4k4k BI | ALEXi 4k4k BI DD | ALEXi 4k4k BI UV1 |
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| EUV, HXR, SXR, VUV | EUV, HXR, SXR, VUV | EUV, HXR, SXR, VUV |
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