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ALEXi - for Imaging

  • 제품유형 Science Camera
  • 제품규격 Detection Range : VUV, EUV, SXR, HXR
    Resolution : ≤ 16.8 Megapixel
    Pixel size : 13 µm × 13 µm, 13.5 µm × 13.5 µm, 15 µm × 15 µm
  • 브랜드 Greateyes GmbH (Germany)

Product Details

Greateyes Logo
 

 

ALEXi

Full-frame deep cooling scientific CCD camera for Imaging applications

 

Greateyes ALEXi
 

 

ALEX for Imaging

 

High resolution up to 16.8 Megapixel

 

ALEXi integrates cutting-edge low-noise electronics and ultra-deep cooling technology while keeping a compact camera design. Multiple readout speeds can be selected supporting pixel rates from 50 kHz up to 5 MHz.

True 18-bit AD conversion allows to exploit the full dynamic range of the CCD sensor for highest performance and SNR. ALEXi is ideally suited for detection of very weak signal intensities where a low-noise floor is paramount.

ALEXi offers unprecedented possibilities for your measurements of tomorrow.

 

Typical Applications

 

  • - EUV Lithography
  • - X-Ray Tomography
  • - Fourier Transform Holography
  • - X-Ray Fluoroscopy
  • - Coherent Diffraction Imaging
  • - Ptychographic Spectromicroscopy
  • - Grazing-Incidence Small-Angle X-Ray Scattering

 

Models

 

ALEXi 1k1k

 

Greateyes ALEXi 1k1k
 

 

Image Area13.3 mm × 13.3 mm
Pixel Format

1024 × 1024 (FI) / 

1056 × 1027 (others) pixels

Pixel Size13 µm × 13 µm
CCD Sensor Cooling

Min. -100°C to 20°C, 

forced air or liquid cooling

Distance Flange - Focal Plane6 mm with CF DN63 flange
Dimensions (W x H x L)

8.3 cm × 10.0 cm × 10.9 cm

(3.27ʺ × 3.94ʺ × 4.29ʺ)

Weight

2.9 kg

(with CF DN63 flange)

 

CCD Sensor Types

 

ALEXi 1k1k BI

ALEXi 1k1k BI DD

ALEXi 1k1k BI UV1

ALEXi 1k1k FI

  • Back-illuminated CCD
  • Back-illuminated, deep-depletion CCD
  • Back-illuminated CCD
  • Front-illuminated CCD
  • High EUV sensitivity
  • Sensitive range: VUV to X-ray range up to 20 keV
  • Up to 96% quantum efficiency, VUV to X-ray range
  • Sensitive X-ray range: 500 eV to 10 keV
  • Up to 96% quantum efficiency, 
  • VUV to X-ray range
  • Up to 98% quantum efficiency 
  • Excellent QE in the EUV and soft X-ray
  • Up to 72% quantum efficiency
  • Full well capacity 100 k e-
  • Full well capacity 120 k e-
  • Full well capacity 100 k e-
  • Full well capacity 100 k e-
EUV, HXR, SXR, VUVEUV, HXR, SXR, VUVEUV, HXR, SXR, VUVHXR, SXR

 

ALEXi 2k2k

 

Greateyes ALEXi 2k2k
 

 

Image Area27.6 mm × 27.6 mm
Pixel Format2048 × 2052 pixels
Pixel Size13.5 µm × 13.5 µm
CCD Sensor Cooling

Min. -90°C to 20°C, 

forced air or liquid cooling

Distance Flange - Focal Plane5 mm with CF DN63 flange
Dimensions (W x H x L)

8.3 cm × 10.0 cm × 10.9 cm

(3.27ʺ × 3.94ʺ × 4.29ʺ)

Weight

2.9 kg

(with CF DN63 flange)

 

CCD Sensor Types

 

ALEXi 2k2k BI

ALEXi 2k2k BI DD

ALEXi 2k2k BI UV1

ALEXi 2k2k FI

ALEXi 2k2k plus BI

  • Back-illuminated CCD
  • Back-illuminated, deep-depletion CCD
  • Back-illuminated CCD
  • Front-illuminated CCD
  • Back-illuminated CCD
  • Up to 96% quantum efficiency, 
  • VUV to X-ray range
  • Sensitive range: VUV to X-ray range up to 20 keV
  • Up to 96% quantum efficiency, 
  • VUV to X-ray range
  • Sensitive X-ray range: 500 eV to 10 keV
  • Up to 96% quantum efficiency, 
  • VUV to X-ray range
  • High EUV sensitivity
  • Up to 98% quantum efficiency 
  • Excellent QE in the EUV and soft X-ray
  • Up to 72% quantum efficiency
  • High EUV sensitivity
  • Full well capacity 100 k e-
  • Full well capacity 150 k e-
  • Full well capacity 150 k e-
  • Full well capacity 100 k e-
  • Full well capacity 150 k e-
EUV, HXR, SXR, VUVEUV, HXR, SXR, VUVEUV, HXR, SXR, VUVHXR, SXREUV, HXR, SXR, VUV

 

ALEXi 2k2k plus

 

Greateyes ALEXi 2k2k plus
 

 

Image Area30.7 mm × 30.7 mm
Pixel Format2048 × 2064 pixels
Pixel Size15 µm × 15 µm
CCD Sensor Cooling

Min. -90°C to 20°C, 

forced air or liquid cooling

Distance Flange - Focal Plane6 mm with CF DN63 flange
Dimensions (W x H x L)

13.7 cm × 13.7 cm × 13.3 cm

(5.39ʺ × 5.39ʺ × 5.24ʺ)

Weight12.5 kg

 

CCD Sensor Types

 

ALEXi 2k2k plus BI

  • Back-illuminated CCD
  • Up to 96% quantum efficiency, 
  • VUV to X-ray range
  • High EUV sensitivity
  • Full well capacity 150 k e-
EUV, HXR, SXR, VUV

 

ALEXi 4k4k

 

Greateyes ALEXi 4k4k
 

 

Image Area61.4 mm × 61.7 mm
Pixel Format4096 × 4096 pixels
Pixel Size15 μm × 15 μm
CCD Sensor Cooling

Min. -90°C to 20°C, 

forced air or liquid cooling

Distance Flange - Focal Plane27 mm
Dimensions (W x H x L)

13.7 cm × 13.7 cm × 13.3 cm

(5.39ʺ × 5.39ʺ × 5.24ʺ)

Weight12.5 kg

 

CCD Sensor Types

 

ALEXi 4k4k BI

ALEXi 4k4k BI DD

ALEXi 4k4k BI UV1

  • Back-illuminated CCD
  • Back-illuminated 16.8 Megapixel CCD
  • Back-illuminated 16.8 Megapixel CCD
  • Up to 97% quantum efficiency, 
  • VUV to X-ray range
  • Up to 97% quantum efficiency, 
  • VUV to X-ray range
  • Up to 97% quantum efficiency, 
  • VUV to X-ray range
  • 16.8 Megapixels
  • Highest EUV / 
  • Soft X-Ray sensitivity
  • Highest EUV / 
  • Soft X-Ray sensitivity
  • Full well capacity 150 k e-
  • Full well capacity 350 k e-
  • Full well capacity 350 k e-
EUV, HXR, SXR, VUVEUV, HXR, SXR, VUVEUV, HXR, SXR, VUV

 

 

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