Ambient Temperature · LS65x.Lab.O / .R Piezo-Linear Stage
Piezoelectric · Linear Motion— LS65x.Lab.O / .R (closed-loop)
Piezoelectric motion@RT solutions — “.Lab Series“ Well packaged piezoelectric motion unit
Piezo-Linear Stage with compact shape and no compromise on power performance; while guaranteeing a premium price space.
Features
- Ultra quiet motion, 20 kHz drive frequency
- 65 × 65 mm × 12 mm Extremely compact form factor
- closed-loop control · Position sensing supports resistance type(.R) and optical type(O.)
- Economy - Spatial Sensing Resolution(.R) 100-200nm
- Minimum pace better than 10 nm
- Multi-axis stacking mount adapters available
- Controller compatible with rotator, goniometer
- High Resolution - Spatial sensing resolution (.O) 1 nm, 10 nm selectable
- Supports non-magnetic (.NM), high vacuum (.HV) and ultra-high vacuum (.UHV) options
Specifications
Optional Versions ⇨ | Default | .NM | .HV | .UHV |
.NM, Absolutely non-magnetic version； .HV, High vacuum version; .UHV, Ultra high vacuum version； | ||||
| 1 Bottom size*height | 65 × 65 mm × 12 mm | |||
| 2 Main Material | Stainless Steel | Pure Ti | Stainless Steel | Stainless Steel |
| 3 Cables & Connectors | Standard shielded cable D-Sub 9 Connector | Kapton enameled Wire， PEEK-2mm Pin | ||
| Motion parameters - space recommended mounting form I. (The following properties are measured in the recommended installation form) | ||||
| 4 Travel | 30 mm | |||
| 5 MAX. Velocity | ~ 20 mm/s | |||
| 6 Min. Step | < 10 nm | |||
| 7 Drive Frequency | Max. 20 kHz （Super quiet movement） | |||
Maximum horizontal 8 force |
2 N | |||
| 9 Holding Force | 5 N | |||
| 10 Full-travel pitch/yaw | 0.3 mrad / 0.2 mrad | |||
| Motion parameters - space recommended installation form II. (The following properties are measured in the recommended installation form) | ||||
| 11 Maximum vertical load | 2 N | |||
| 12 Holding Force | 5 N | |||
| Sensing accuracy | ||||
| 13 Position Sensing Type | - Resistance type sensing ( .R ) - Optical scale sensing ( .O ) | |||
| 14 Position sensing range | 30 mm | |||
| 15 Position sensing resolution | - Resistance type sensing ( .R ), 100-200 nm - Optical scale sensing ( .O ), 10 nm ( default )，1nm ( option ) | |||
