Ambient Temperature · Carrier.L7550.XY Large-range piezoelectric scanning table
Piezoelectric · Large Travel Linear Motion— Carrier.L7550.XY
Piezoelectric motion@RT solutions — “.Carrier Series“ Large Travel Carrier - Precision Optics, Semiconductor Characterization
Piezo-Linear Stage with compact shape and no compromise on power
performance; while guaranteeing a premium price space.
Features
- XY-directional range 75 mm × 50 mm
- Smallest size of about 20 nm
- Maximum velocity 20 mm/s
- Closed-loop sensing with 100 nm / 10 nm spatial resolution
- Guaranteed through-hole of 85 mm × 65 mm for full range of motion
- Supports no magnetism (.NM) & ultra-high vacuum (.UHV)
- Main body aluminum alloy (hard oxide blackened)
Specifications
Optional Versions ⇨ | Default | .NM | .HV | .UHV |
| .NM version, non-magnetic; .HV version, high vacuum; .UHV version, compatible with 2E-11 mbar | |||
Orientation of 1 movement | X，Y | |||
| 2 Bottom size * height | 250 mm × 200 mm × 30 mm | |||
Required installation 3 space | 325 mm × 250 mm | |||
| 4 Effective perforation | 85 mm × 65 mm | |||
| 5 Main Material | Aluminum alloy | |||
| 6 Cables & Connectors | Standard shielded cable D-Sub 9 Connector | Kapton enameled Wire， PEEK-2mm Pin | ||
| 7 Operating temperature | 10 – 40 °C | |||
| Motion parameters - space recommended mounting form I. (The following properties are measured in the recommended installation form) | ||||
| 8 Travel | 75 mm × 50 mm | |||
| 9 MAX. Velocity | ~ 20 mm/s | |||
| 10 Min. Step | ～ 30 nm | |||
| 11 Drive Frequency | Max. 20 kHz （Super quiet movement） | |||
| 12 Maximum load | 2 kg | |||
| 13 Full-travel pitch/yaw | 0.8 mrad | |||
| Sensing accuracy | ||||
| 14 Position Sensing Type | - Resistance type sensing ( .R ) - Optical scale sensing ( .O ) | |||
| 15 Position sensing range | 75 mm × 50 mm | |||
| 16 Position sensing resolution | - Resistance type sensing ( .R ), 100-200 nm - Optical scale sensing ( .O ), 10 nm ( default )，1nm ( option ) | |||
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