Ambient Temperature · Carrier.S200.XY Large-range piezoelectric scanning table
Piezoelectric · Large scale scanning motion— Carrier.S200.XY
Piezoelectric motion@RT solutions — “.Carrier Series“ Large scale scanning carrier - Precision Optics, Semiconductor Characterization
Piezo-Linear Stage with compact shape and no compromise on power
performance; while guaranteeing a premium price space.
Features
- Two-dimensional XY scanning motion 200 um × 200 um
- Closed-loop positioning accuracy better than 1 nm
- Maximum load 500 g
- Customized solutions for optical microscopy-super-resolution
- Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades
Specifications
Optional Versions ⇨ | Default |
| .NM version, non-magnetic; .HV version, high vacuum; .UHV version, compatible with 2E-11 mbar |
| 1 Bottom size * height | 180 mm × 150 mm × 20 mm |
| 2 Main Material | Aluminum alloy |
| 3 Hollow perforation | 80 mm × 60 mm |
| 4 Travel | 200 um × 200 um |
| 5 Closed-loop resolution | < 1nm |
| 6 Maximum load | 500 g |
| 7 Closed-loop sensors | Capacitive |
| 8 Capacitance accuracy | 0.3 nm |
| 9 Piezoelectric capacitance (X, Y) | 6.5 μF |
| 10 Operating temperature | 15 – 40 °C |
| 11 Quality | 1 kg |
| 12 Installation | Automatic compatibility of threaded holes Carrier.L7550.XY |
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