Ambient Temperature · Carrier.S100-OB.Z Objective autofocus scanning table
Piezoelectric · Large-range piezoelectric scanning — Carrier.S100-OB.Z
Piezoelectric motion@RT solutions — “.Carrier Series“ Large Travel Scanning - Precision Optics, Semiconductor Characterization
Piezo-Linear Stage with compact shape and no compromise on power performance;
while guaranteeing a premium price space.
Features
- Z-directional motion range of 200 μm
- Fastest stabilization time (90% position stabilization) within 20ms
- Closed-loop positioning accuracy better than 1 nm
- Maximum load 500 g
- Controller compatible with MultiFieldsⓇ Motion Controller - Archimedes Series
- Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades
Specifications
Optional Versions ⇨ | Default |
.NM version, non-magnetic; .HV version, high vacuum; .UHV version, compatible with 2E-11 mbar | |
| 1 Orientation of movement | Z axis |
| 2 Travel range | 100 um |
| 3 Linearity | 0.02% |
| 4 Pitch / Yaw | 30 urad |
| 5 Position encoder | Resistive Sensor |
| 6 Sensor noise | 0.3 nm |
| 7 Z axis resolution, open-loop | 0.1 nm |
| 8 Stabilize time (90% Position) | 15 ms |
| 9 Rigidity | 0.4 N/um |
| 10 Resonant frequency (no load) | 650 Hz |
| 11 Resonant frequency (150g load) | 275 Hz |
| 12 Weight | 270 g |
| 13 Mainbody | Stainless steel 304，Aluminum alloy |
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