Ambient Temperature · 3-D Piezoelectric Scanning Table
Piezoelectric motion@RT solutions — “.Lab Series“ 3 degrees of freedom scanning motion - precision optics, semiconductor characterization
Features
- Three-dimensional XY scanning motion 150 um × 150 um × 150 um
- External dimensions, 55 mm × 55 mm × 42 mm
- Closed-loop positioning accuracy better than 1 nm
- Maximum load 500 g
- Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades
Specifications
.NM version, non-magnetic; .UHV version, compatible with 2E-11 mbar | |
| General Information | |
| 1 Orientation of movement | X，Y，Z |
| 2 Bottom size * height | 55 mm × 55 mm × 55 mm |
| 3 Main Material | Aluminum alloy / Stainless steel |
| 4 Travel | 150 um × 150 um × 150 um |
| Movement & Positioning | |
| 5 Motion Resolution | 0.2 nm |
| 6 Repeatable accuracy of motion | 15 nm |
| 7 Linearity error | < 0.1% |
| 8 Resonance frequency - 50g load | 220 Hz |
| 9 Rigid | 0.5 N/um |
| 10 Maximum load | 500 g |
| 11 Closed-loop sensors | Capacitive |
| 12 Capacitance accuracy | 0.3 nm |
| 13 Piezoelectric capacitance (X,Y) | Max. 120 V |
| Other | |
| 14 Operating temperature | -20 ~ 80 °C |
| 15 Quality | 200 g |
| 16 Cable length | 1.5 m / micro-Sub connector |
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