P72 Piezo Objective Scanners, 100μm stroke
P72 series piezoelectric objective scanner is a Z-axis motion piezoelectric objective positioner specially designed for objective lens focusing microscopy.
It adopts a frictionless flexible hinge parallel guiding mechanism design, with super high focusing stability.
The objective positioner is loaded with a microscopic detection/measurement or observation device, and can take lens to generate Z-direction focus to improve accuracy and can be used with a variety of high resolution microscopes.
Features
- Travel to 100μm
- Load capacity to 0.2kg
- Millisecond response time
- Closed loop for higher repeatability
- Open/closed loop
Applications
- Adjustment focus
- Image processing
- Confocal microscope
- Semiconductor inspection
- Laser processing
- Interference shape measurement
Recommended Controllers
Specifications
| Models | Suffix S-Closed loop Suffix K-Open loop | P72.Z100S | P72.Z100K | Units |
| Active axis | Z | Z | ||
| Drive control | 1 driving channel 1 sensing channel | 1 driving channel | ||
| Travel range（0~120V） | 80 | 80 | μm±10% | |
| Max.travel range（0~150V） | 100 | 100 | μm±10% | |
| Sensor type | SGS | - | ||
| Resolution | 3 | 1 | nm | |
| Linearity | 0.1 | - | %F.S. | |
| Repeatability | 0.05 | - | %F.S. | |
| Push/pull force | 110/15 | 110/15 | N | |
| Stiffness in motion direction | 1.4 | 1.4 | N/μm±20% | |
| Unloaded resonant frequency | 350 | 350 | Hz±20% | |
| Unloaded step time | 10 | 3 | ms±20% | |
| Closed-loop operating frequency（-3dB） | 70（@100g load） | - | Hz±20% | |
| Load capacity | 0.2 | 0.2 | kg | |
| El.capacitance | 3.6 | 3.6 | μF±20% | |
| Material | Steel | Steel | ||
| Mass | 150 | 150 | g±5% | |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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