P73 Piezo Objective Scanners, 500μm stroke
P73 series piezoelectric objective scanner features a large of 200μm, 500μm, 1000μm in Z direction.
It also adopts flexible hinge design mechanism, no friction, good linearity and high positioning accuracy.
The seperate thread adapter design can be adapted to a wide range of microscopes and is widely used in long-travel scanning of microscopic imaging, two-photon microscopy and other fields.
Features
- Optional travels of 200/500/1000μm
- Load capacity to 0.2kg or 0.4kg
- Millisecond response time
- Closed loop for higher repeatability
- Excellent focus stability
Applications
- Adjustment focus
- Image processing
- Confocal microscope
- Semiconductor inspection
- Laser processing
- Interference shape measurement
Recommended Controllers
Specifications
| Models | S-Closed loop K-Open loop | P73.Z200S P73.Z200K | P73.Z500S-C P73.Z500K-C | P73.Z1000S P73.Z1000K | Units |
| Active axis | Z | Z | Z | ||
| Drive control | 1 driving channel 1 sensing channel | 1 driving channel 1 sensing channel | 1 driving channel 1 sensing channel | ||
| Travel range（0~120V） | 160 | 400 | 800 | μm±10% | |
| Max.travel range（0~150V） | 200 | 500 | 1000 | μm±10% | |
| Sensor | SGS/- | SGS/- | SGS/- | ||
| Closed/open loop resoluiton | 5.5/2 | 14/4 | 36/8 | nm | |
| Linearity | 0.1/- | 0.1/- | 0.5/- | %F.S. | |
| Repeatability | 0.05/- | 0.05/- | 0.3/- | %F.S. | |
| Push/pull force | 80/10 | 80/10 | 20/5 | N | |
| Stiffness | 0.25 | 0.2 | 0.02 | N/μm±20% | |
| Unloaded resonant frequency | 210 | 170 | 110 | Hz±20% | |
| Closed/open loop unloaded step time | 20/10 | 120@200g/10 | 150/25 | ms±20% | |
| Load | 0.2 | 0.4 | 0.2 | kg | |
| Capacitance | 7.2 | 14 | 43.2 | μF±20% | |
| Material | Steel, Al | Steel, Al | Steel, Al | ||
| Mass | 210 | 300 | 786 | g±5% | |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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