P76 Piezo Objective Scanners, 50 100 200μm, load to 900g
P76 series piezoelectric objective scanner features a large load capacity up to 900g, Z-axis linear motion range up to 200μm, adopting flexible hinge design mechanism, no friction, good linearity, high closed-loop positioning accuracy.
The seperate thread adapter design accommodates a wide range of microscopes.
Features
- Travel to 200μm
- Load capacity to 900g
- Millisecond response time
- Closed loop for higher repeatability
- Excellent focusing stability
Applications
- Adjustment focus
- Image processing
- Confocal microscope
- Semiconductor inspection
- Laser processing
- Interference shape measurement
Recommended Controllers
Specifications
| Models | S-Closed loop K-Open loop | P76.Z50S P76.Z50K | P76.Z70S P76.Z70K
| P76.Z80S P76.Z80K | P76.Z100S P76.Z100K | P76.Z150S44 P76.Z150K44 | P76.Z200S P76.Z200K | Units |
| Active axes | Z | Z | Z | Z | Z | Z | ||
| Drive control | 1 driving channel 1 sensing channel | 1 driving channel 1 sensing channel | 1 driving channel 1 sensing channel | 1 driving channel 1 sensing channel | 1 driving channel 1 sensing channel | 1 driving channel 1 sensing channel | ||
| Travel range（0~120V） | 40 | 60 | 64 | 80 | 108 | 160 | μm±10% | |
| Max.travel range（0~150V） | 50 | 75 | 80 | 100 | 135 | 200 | μm±10% | |
| Sensor type | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | ||
| Resolution | 1.5/0.5 | 2/1 | 3/1 | 3/1 | 5/1.5 | 5.5/2 | nm | |
| Linearity | 0.03/- | 0.03/- | 0.03/- | 0.03/- | 0.03/- | 0.1/- | %F.S. | |
| Repeatability | 0.02/- | 0.02/- | 0.02/- | 0.02/- | 0.06/- | 0.05/- | %F.S. | |
| Push/pull force | 35/10 | 180/16 | - | 70/10 | - | - | N | |
| Stiffness | 0.8 | 3 | - | 0.8 | - | - | N/μm±20% | |
| Unloaded resonant frequency | 800 | 1800 | 1700 | 800 | 890 (330@500g) | 900 | Hz±20% | |
| Closed-loop operating frequency（-3dB） | - | - | - | 160（unloaded） | - | - | Hz±20% | |
| Unloaded step time | 5/2 | 1.6/1 | 15@24μm、900g/- | 5/2 | 25@500g/10 | 10/4 | ms±20% | |
| Load capacity | 0.5 | 0.5 | 0.9 | 0.5 | 0.5 | 0.5 | kg | |
| El.capacitance | 3.2 | 7.2 | 14.4 | 7.2 | 19.2 | 28.8 | μF±20% | |
| Material | Steel | Steel, Al | Steel, Al | Steel, Al | Al,Ti | Steel, Al | ||
| Mass | 430 | 520 | 765 | 500 | 525(including wires and connectors) | 740 | g±5% | |
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