Other Piezo Objective Scanner
Specifications
| Type | XD701.150S/K | Units |
| Active axes | Z | |
| Drive control | 1 driving channel 1 sensing channel | |
| Sensor | SGS/CAP | |
| Travel range(0~150V) | 150 | μm±20% |
| Resolution(5mV) | 2/5 | nm±20% |
| Aperture | Ø25~Ø50 | mm |
| Load capacity | 2 | kg |
| Unloaded resonant frequency | 400 | Hz±20% |
| Resonant frequency @2kg | 3.6 | Hz±20% |
| Mass(with no cable) | 1.8 | kg±5% |
| El. capacitance | 29 | μF±20% |
| Material | Steel, Al |
| Type | 21062 | Units |
| Active axes | Z | |
| Travel range(0~150V) | 7 | μm±20% |
| Sensor | SGS | |
| Aperture | Φ10 | mm |
| Size | Φ30×22 | mm |
| Closed/open loop resolution | 0.5/0.2 | nm±20% |
| Closed-loop linearity | 0.5 | %F.S.±20% |
| Repeatability | 0.2 | %F.S.±20% |
| Stiffness | 50 | N/μm±20% |
| Push/pull force | 350/20 | N |
| Unloaded resonant frequency | 6 | KHz±20% |
| Load capacity | 500 | g |
| El. capacitance | 0.8 | μF±20% |
| Material | Steel |
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