XD730.100 Piezo Objective Scanner
XD730.100 Piezo Objective Scanner is a Z-motion platform designed for large loads and 100-micron travel.
Its travel range is up to 100μm and its carrying capacity is up to 0.5kg.
It is very suitable for nano-scale objective motion control.
Features
- Motion in Z
- Travel up to 100μm
- Load capacity up to 0.5kg
- Optional closed-loop sensor
- Customizable
Applications
- Focus microscopy
- Laser processing
- Z Positioning and Scanning
- Surface Structure Analysis
- Interference/metrology
- Semiconductor testing
Specifications
| Type | XD730.400S-B1 | XD730.400K-B1 | Units |
| Active axes | Z | Z | |
| Drive control | 1 driving channel 1 sensing channel | 1 driving channel | |
| Travel range(0~120V) | 80 | 80 | μm±10% |
| Max.travel(0~150V) | 100 | 100 | μm±10% |
| Sensor | SGS | - | |
| Open loop resolution | 《<10 | 5 | nm |
| Linearity | 0.12 | - | %F.S. |
| Repeatability | 0.03 | - | %F.S. |
| Unloaded resonant frequency | 310 | 310 | Hz±20% |
| Unloaded step time | 30 | 2 | ms±20% |
| El. capacitance | 6.8 | 6.8 | μF±10% |
| Load capacity | 0.5 | 0.5 | kg |
| Material | Al, Steel | Al, Steel | |
| Mass | 190 | 190 | g±5% |
Note: Above parameters are measured with the E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For highreliability and long-term operation, the recommended driving voltage is 0~120V.
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