P72.Z80 Piezo Objective Scanner
Features
- Travel to 80μm
- Load capacity to 0.4kg
- Millisecond response time
- Closed loop for high repeatability
Applications
- 3D imaging
- Interference/metering
- Surface structure analysis
- Confocal microscope
- Biotechnology
- Semiconductor test
Specifications
| Type | S-Closed loop | P72.Z80S | P72.Z80K | Units |
| K-Open loop | ||||
| Active axes | Z | Z | ||
| Drive control | 1 driving channel 1 sensing channel | 1 driving channel | ||
| Nominal travel range(0~120V) | 64 | 64 | µm±10% | |
| Max.travel range(0~150V) | 80 | 80 | µm±10% | |
| Integrated sensor | SGS | - | ||
| Resolution | 3 | 1 | nm，typ. | |
| Closed-loop linearity | 0.1 | - | %F.S. | |
| Repeatability | 0.05 | - | %F.S. | |
| Push/pull force | 160/20 | 160/20 | N | |
| Stiffness | 2 | 2 | N/µm±20% | |
| Unloaded resonant frequency | 700 | 700 | Hz±20% | |
| Loaded resonant frequency | 300@400g | 300@400g | Hz±20% | |
| Unloaded step time | 7 | 2.5 | ms±20% | |
| Closed-loop operating frequency (-3dB) | - | - | Hz±20% | |
| Load capacity | 0.4 | 0.4 | Kg | |
| El. capacitance | 14 | 14 | μF±20% | |
| Material | Steel | Steel | ||
| Mass | 360（no cable） | 360（no cable） | g±5% | |
Note: Above parameters are measured with the E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For highreliability and long-term operation, the recommended driving voltage is 0~120V.
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