P76F Piezo Objective Scanner
The P76F is a Z-direction piezo objective scanner with a maximum displacement of 90μm and a load capacity up to 900g, making it suitable for high load applications such as laser invisible cutting of wafer.
The objective lens connector has various adapters thread to choose, and is customizable according to customer needs.
It can be fixed through two different aperture through holes.
It adopts flexible hinge mechanism, with no friction, good linearity and high positioning accuracy.
Features
- Max stroke to 90μm
- Load capacity to 900g
- Millisecond response time
- Adapters compatible
Applications
- 3D imaging
- Interference/metering
- Auto focusing system
- Confocal microscope
- Wafer cutting
- Semiconductor test
Recommended Controllers
Specifications
| Type | S-Closed loop | P76F.Z80S60-C | P76F.Z80K60-C | Units |
| K-Open loop | ||||
| Active axes | Z | Z | ||
| Drive control | 1 driving channel 1 sensing channel | 1 driving channel | ||
| Nominal travel range(0~120V) | 72 | 72 | µm±10% | |
| Max.travel range(0~150V) | 90 | 90 | µm±10% | |
| Integrated sensor | SGS | - | ||
| Resolution | 3 | 1 | nm，typ. | |
| Closed-loop linearity | 0.2 | - | %F.S. | |
| Repeatability | 0.03 | - | %F.S. | |
| Pitch/yaw/roll | ＜20 | ＜20 | μrad | |
| Unloaded resonant frequency | 750 | 750 | Hz±20% | |
| Loaded resonant frequency@900g | 280 | 280 | Hz±20% | |
| Step time | 10@900g | 3 | ms±20% | |
| Load capacity | 0.9 | 0.9 | Kg | |
| El. capacitance | 14.4 | 14.4 | μF±20% | |
| Material | AI,Steel | AI,Steel | ||
| Mass | 1740 | 1740 | g±5% | |
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