P75 Piezo Objective Scanner
The P76F is a Z-direction piezo objective scanner with a maximum displacement of 90μm and a load capacity up to 900g, making it suitable for high load applications such as laser invisible cutting of wafer.
The objective lens connector has various adapters thread to choose, and is customizable according to customer needs.
It can be fixed through two different aperture through holes.
It adopts flexible hinge mechanism, with no friction, good linearity and high positioning accuracy.
Features
- Max. travel range to 250μm
- Load capacity to 0.2kg
- Unloaded resonant frequency to 389Hz
- Design of separated thread adapter
Applications
- 3D imaging
- Interference/metering
- Biotechnology
- Confocal microscope
- Surface structure analysis
- Semiconductor test
Recommended Controllers
Specifications
| Type | S-Closed loop | P75.Z200S | P75.Z200K | Units |
| K-Open loop | ||||
| Active axes | Z | Z | ||
| Drive control | 1 driving channel 1 sensing channel | 1 driving channel | ||
| Nominal travel range(0~120V) | 200 | 200 | µm±10% | |
| Max.travel range(0~150V) | 250 | 250 | µm±10% | |
| Integrated sensor | SGS | - | ||
| Resolution | 6 | 2.5 | nm | |
| Linearity | 0.125 | - | %F.S. | |
| Repeatability | 0.05 | - | %F.S. | |
| Push/pull force | 25/10 | 25/10 | N | |
| Stiffness | 0.1 | 0.1 | N/μm±20% | |
| Unloaded resonant frequency | 389 | 389 | Hz±20% | |
| Closed-loop operating frequency (-3dB) | 20 | - | Hz±20% | |
| Step time | 25 | 10 | ms±20% | |
| Load capacity | 0.2 | 0.2 | kg | |
| El. capacitance | 6.5 | 6.5 | μF±20% | |
| Material | AI,Steel | AI,Steel | ||
| Mass | 225 | 225 | g±5% | |
CoreMorrow 홈페이지
P75 Piezo Objective Scanner | CoreMorrow
- 다음 제품이 없습니다.
- P76F Piezo Objective Scanner
