P12A Piezo Nanopositioning Scanners Travel to 200, 400, 600μm
Features
- 1 to 3 axes motion version for choice
- Travel to 600μm in one single axis
- Travel to 200μm/axis for multiple axes version
- Optional closed-loop sensor
- Aperture of 45×45mm
Applications
- Scanning microscopy
- Confocal microscopy
- Surface measurement
- Semiconductor test
- Wafer positioning
- Image processing and stabilization
Specifications
| Type | S-Closed loop K-Open Loop | P12A.X200S P12A.X200K | P12A.Z200S P12A.Z200K | P12A.Z400S P12A.Z400K | P12A.Z600S P12A.Z600K | P12A.XY200S P12A.XY200K | P12A.XZ200S P12A.XZ200K | P12A.XYZ200S P12A.XYZ200K | Units |
| Active axes | X | Z | Z | Z | X、Y | X、Z | X、Y、Z | ||
| Drive control | 1 driving channels 1sensing channels | 1 driving channels 1sensing channels | 1 driving channels 1sensing channels | 1 driving channels 1sensing channels | 2 driving channels 2 sensing channels | 2 driving channels 2 sensing channels | 3 driving channels 3sensing channels | ||
| Nominal travel（0~120V） | 160 | 160 | 320 | 480 | 160/axis | 160/axis | 160/axis | μm±20% | |
| Max.travel（0~150V） | 200 | 200 | 400 | 600 | 200/axis | 200/axis | 200/axis | μm±20% | |
| Sensor type | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | ||
| Resolution | 5.5/2 | 5.5/2 | 11/3.5 | 16/5 | 5.5/2 | 5.5/2 | 5.5/2 | nm | |
| Linearity | 0.3/- | 0.3/- | 0.4/- | 0.5/- | 0.4/- | 0.4/- | 0.5/- | %F.S. | |
| Repeatability | 0.2/- | 0.2/- | 0.3/- | 0.4/- | 0.3/- | 0.3/- | 0.4/- | %F.S. | |
| Unloaded resonant frequency | 160 | 160 | 130 | 80 | X160/Y140 | X160/Z140 | X150/Y130/Z90 | Hz±20% | |
| Load capacity | Horizontal | 0.5 | 0.5 | 0.4 | 0.3 | 0.4 | 0.4 | 0.3 | kg |
| Vertical | 0.03 | 0.03 | 0.02 | 0.01 | 0.02 | 0.01 | 0.01 | ||
| Inverted | 0.5 | 0.03 | 0.02 | 0.01 | 0.4 | 0.02 | 0.01 | ||
| El.capacitance | 7.2 | 7.2 | 14.4 | 21.6 | 7.2/axis | 7.2/axis | 7.2/axis | μF±20% | |
| Material | Steel, Al | Steel, Al | Steel, Al | Steel, Al | Steel, Al | Steel,AI | Steel, Al | ||
Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for high-reliability and long-term use.
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