P78A.Z200 Piezo Nanopositioning Scanners
P78A.Z200 piezo scanner moves in Z, its travel is up to 200μm, and it features a φ25mm aperture that is suitable for light-transmitted application.
Features
- Z motion, travel to 200μm
- Optional upright, lateral, inverted mounting
- Optional vacuum version
Applications
- Surface inspection
- Microscopic imaging
- Optical interference
- Semiconductor processing and testing
- Vacuum environment
Specifications
| Type | P78A.Z200S | P78A.Z200K | Units | |
| Active axis | Z | Z | ||
| Drive control | 1 driving channel 1 sensing channel | 1 driving channel | ||
| Sensor | SGS | - | ||
| Travel range (0~120V) | 160 | 160 | μm±10% | |
| Max.travel range (0~150V) | 200 | 200 | μm±10% | |
| Resolution | 10 | 3 | nm | |
| Linearity | 0.2 | - | %F.S. | |
| Repeatability | 0.15 | - | %F.S. | |
| Load capacity | Horizontal | 0.2 | 0.2 | kg |
| Vertical | 0.02 | 0.02 | ||
| Inverted | 2 | 2 | ||
| Mass | 260 | 260 | g±5% | |
| El. capacitance | 28.8 | 28.8 | μF±20% | |
| Material | Steel, Aluminum | Steel, Aluminum | ||
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