XD108 Piezo Nanopositioning Scanner
XD108 is a customized version of X-axis piezo nanopositioning scanner, with two ranges available: 30μm and 37μm.
It adopts a no-friction flexible hinge guiding mechanism and integrated structural design.
It is equipped with high-performance piezo actuators to ensure 37μm displacement.
Features
- Moves in X
- Travel up to 37μm
- High resolution
- Open/closed loop
Applications
- Optical phase shift
- Nano positioning
- Biotechnology
- Quality assurance test
- Micromachining/precision control
Specifications
| Type | XD108.30S XD108.30K | XD108.40S XD108.40K | Units | |
| Active axes | X | X | ||
| Drive control | 1 driving channel 1 sensing channel | 1 driving channel 1 sensing channel | ||
| Nominal travel range(0~120V) | 24 | 30 | µm±10% | |
| Max.travel range(0~150V) | 30 | 37 | µm±10% | |
| Sensor type | SGS/- | SGS/- | ||
| Resolution | 1/0.3 | 2/0.4 | nm | |
| Linearity | 0.302/- | 0.03/- | %F.S. | |
| Repeatability | 0.021/- | 0.01/- | %F.S. | |
| Unloaded resonant frequency | 3300 | 2200 | Hz±20% | |
| Loaded resonant frequency | 1200@17kg | 1000@74g | Hz±20% | |
| Load capacity | Horizontal | 0.1 | 0.1 | kg |
| Vertical | 0.03 | 0.02 | ||
| Inverted | 0.1 | 0.1 | ||
| Step time | 5@17g/1 | 5@74g/1 | ms±20% | |
| El. Capacitance | 2.5 | 3.6 | μF±20% | |
| Material | Al, Steel | Al, Steel | ||
| Mass | 600 | 620 | g±5% | |
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