XD110.Z50 Piezo Scanner
XD110.Z50 piezo scanner moves in Z, its travel is up to 50μm.
It has a large square aperture, and is ideal for sample microscopy imaging applications.
Features
- Z motion
- Load capacity to 5kg
- Nanoscale resolution
- Travel up to 50μm
Specifications
| Type | XD110.Z50S | XD110.Z50K | Units | |
| Active axes | Z | Z | ||
| Drive control | 1 driving channel 1 sensing channel | 1 driving channel | ||
| Nominal travel range(0~120V) | 40 | 40 | µm±10% | |
| Max.travel range(0~150V) | 50 | 50 | µm±10% | |
| Sensor type | SGS | - | ||
| Resolution | 2 | 0.5 | nm | |
| Linearity | 0.27 | - | %F.S. | |
| Repeatability | 0.023 | - | %F.S. | |
| Unloaded resonant frequency | 370 | 370 | Hz±20% | |
| Resonant frequency@5kg | 100 | 100 | Hz±20% | |
| Load capacity | Horizontal | 5 | 5 | kg |
| Vertical | 0.1 | 0.1 | ||
| Inverted | 0.5 | 0.5 | ||
| Step time | 60@5kg | 10 | ms±20% | |
| El. Capacitance | 5.6 | 5.6 | μF±20% | |
| Material | Al, Steel | Al, Steel | ||
| Mass | 1.1 | 1.1 | kg±5% | |
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