• X/Z Piezo Scanners

P77.100S85 P77.100K85 Piezo Phase Shifter

  • 제품유형 X/Z Piezo Scanners
  • 제품규격 Axes : Z
    Travel Range : <100 μm
    Aperture : Φ85 mm
    Resolution : 5/1.5 nm
  • 브랜드 CoreMorrow

Product Details

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P77.100S85 P77.100K85 Piezo Phase Shifter

 

 

 

Features

 

 - Z axis motion

 - Travel to 100μm

 - Aperture:Ø85mm

 - Optional horizontal, vertical, inverted mounting

 

 

Specifications

 

ModelsP77.100S85P77.100K85Units
Active axesZZ 
Travel range(0~120V)8080μm±10%
Max.travel range(0~150V)100100μm±10%
SensorSGS- 
ApertureΦ85Φ85mm
Resolution51.5nm
Pitch/Yaw/Roll<5<5μrad
Push/pull force--N
Unloaded resonant frequency190190Hz±20%
Unloaded Step time20@10μm,1.2kg5ms±20%
Load capacityHorizontal33kg
Vertical11
Inverted11
Electrical capacitance14.414.4μF±20%
MaterialAl, CopperAl, Copper 
Mass20002000g±5%
Operating temperature-20~80-20~80
Cable length1.51.5m±10mm

 Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. 

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

 

 

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P77.100S85 P77.100K85 Piezo Phase Shifter | CoreMorrow