Ambient Temperature · 6-D piezoelectric Positioning System
Piezo · 6D Positioning System— HP120.Lab.O / .R (Close-loop)
Piezoelectric motion@RT solutions — “.Lab Series“ Well packaged piezoelectric motion unit
6 degrees; Parallel design; More stable.
Features
- Super silent，20 kHz drive frequency
- Size: Ø126 × 74 mm
- Close loop · Resistive encoder (.R) & Optical encoder (.O) optional
- High precision · Resolution (.O) 1 nm、10 nm Optional
- Economical · Resolution(.R) 100-200nm
- Minimum step size < 10 nm
- 20 mm (XY); 10 mm (Z); 20 ° (ΘxΘy); 30 ° (Θz)
- Maximum vertical load: 500 g
- Non magnet（.NM), High Vacuum（.HV）& Ultra-high Vacuum（.UHV）optional
Specifications
Optional Versions ⇨ | Default | .NM | .HV | .UHV |
.HV version, default product; .ULT version, used at He3 or dilution cryogenics systems .UHV version, compatible with 2E-11 mbar | ||||
| 1 Size | Φ126 x 74mm | |||
| 2 Material | Stainless Steel | Pure Titanium | Stainless Steel | Stainless Steel |
3 Cable & Connector (6x) | Shielded cable & DSub9 Connector | kapton coated wire, PEEK-2mm pins | ||
| 4 Travel Range (XYZ) | 20 x 20 x 10 mm | |||
| 5 Travel Range (ΘxΘyΘz) | 20 x 20 x 30° | |||
| 6 Minimum Step Size | ~ 10 nm | |||
| 7 Drive Frequency | Max. 20 kHz (super silent) | |||
| 8 Maximum Vertical Load | 5 N | |||
9 Maximum Vertical Holding Force | 10 N | |||
| Encoder Resolution | ||||
| 13 Encoder Type | - Resistive encoder (.R) - Optical encoder (.O) | |||
| 14 Encoder Range | 30 mm | |||
| 15 Resolution | - Resistive encoder (.R), 100-200 nm - Optical encoder (.O), 10 nm, 1nm optional (10 nm for default) | |||
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