Tilt Stage
| Model | TSMT3-1A | TSMT5-1A | TSMT5-2/3 | TSMT-4 |
| Adjust range(°) | ±3 | ±5 | ±3 | Tilt ±4, , Rotation±2.5 |
| Table size(mm) | 120x80 | 125x75 | 55x55 | 91.5x73 |
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