Ultra-Precision Linear Stage
| Model | uKSA50 | uKSA100 | uKSA150 | uKSA200 |
| Travel(mm) | 50 | 100 | 150 | 200 |
| Table Dimension(mm) | 245 x 180 | 295 x 150 | 345 x 180 | 400 x 180 |
| PItch(mm) | 4 | 4 | 4 | 4 |
| Closed-Loop Resolution(µm) | 0.1 | 0.1 | 0.1 | 0.1 |
| Max Speed(mm/s) | 40 | 40 | 40 | 40 |
| Motors | 3 Phase | 3 Phase | 3 Phase | 3 Phase |
| Repeatability(µm) | 2 | 2 | 2 | 2 |
| Backlash(µm) | 1 | 1 | 1 | 1 |
| Straightness(µm) | 6 | 6 | 10 | 10 |
| Parallism(µm) | 6 | 6 | 10 | 10 |
| Load(kg) | 30 | 30 | 30 | 30 |
