High Voltage Actuator with High Blocking Force
Features
- Voltage : 500V/1000V
- High Load Capacity
- High Response Frequency
- High Power
- Nanopositioning
- Active Vibration Damping
- Semiconductor Processing and Testing
- Optics Adjustment
Specifications
Piezo Material and Mechanical Data
Parameters | Standard HS/HT | Custom HP | |
| ᵋref | 1850 | 3800 | |
| Loss factor 10⁻⁴ | 130 | 160 | |
| Coupling factors | Kₚ | 0.62 | 0.65 |
K₃₁ | 0.34 | 0.38 | |
K₃₃ | 0.72 | 0.74 | |
Piezoelectric charge coefficients(pm/V) | d₃₁ | -190 | -275 |
d₃₃ | 440 | 680 | |
Elast. compliance 10⁻¹²m² /N | S₁₁ᴱ | 18.5 | 15.8 |
S₃₃ᴱ | 20.7 | 23 | |
Frequency constant m/s | Radial | 2020 | 1960 |
Thickness | 2030 | 1885 | |
Transverse | 1325 | 1420 | |
Longitudinal | 1250 | 1190 | |
| Quality factor | 80 | 80 | |
| Density g/cm³ | 7.74 | 7.83 | |
| Curie temperature °C | 340 | 215 | |
| Max operating temperature °C | 200 | 90 | |
| Spec. heat Ws/°K kg | 380 | 380 | |
Thermal conductivity Ws/m·K(axial) | ca. 1.5 | ca. 1.5 | |
| CTE ppm/°C | 0~2 | 0~2 | |
Technical Data
Models | Max./ Stroke | Length[mm] | El.capacitance | Stiffness | Resonant Frequency[kHz] | Max. Blocking Force[N] |
PSt500/10/15 | 24/18 | 18 | 180 | 130 | 30 | 4000 |
PSt500/10/25 | 35/25 | 27 | 340 | 90 | 25 | 4000 |
PSt1000/10/5 | 12/7 | 9 | 20 | 300 | 60 | 4000 |
PSt1000/10/15 | 24/18 | 18 | 45 | 150 | 40 | 4000 |
PSt1000/10/25 | 35/25 | 27 | 85 | 100 | 30 | 4000 |
PSt1000/10/40 | 55/40 | 36 | 110 | 75 | 25 | 4000 |
PSt1000/10/60 | 80/60 | 54 | 170 | 50 | 20 | 4000 |
PSt1000/16/20 | 27/20 | 18 | 150 | 400 | 40 | 12000 |
PSt1000/16/40 | 55/40 | 36 | 360 | 200 | 25 | 12000 |
PSt1000/16/60 | 80/60 | 54 | 540 | 120 | 20 | 12000 |
PSt1000/16/80 | 105/80 | 72 | 720 | 90 | 15 | 12000 |
PSt1000/25/40 | 55/40 | 36 | 800 | 450 | 25 | 25000 |
PSt1000/25/60 | 80/60 | 54 | 1250 | 300 | 20 | 25000 |
PSt1000/25/80 | 105/80 | 72 | 1700 | 200 | 15 | 25000 |
PSt1000/35/40 | 55/40 | 36 | 1600 | 1000 | 25 | 50000 |
PSt1000/35/60 | 80/60 | 54 | 2500 | 600 | 20 | 50000 |
PSt1000/35/80 | 105/80 | 72 | 3300 | 450 | 15 | 50000 |
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