FQCW266-200
Features
- 266 nm
- Continuous Wave
- Single Frequency
- Low Intensity Noise
- M² < 1.3, TEM₀₀
- Up to 200 mW
- Conduction Cooled
- Patented Design(*)
Product Advantages
- User friendly plug & play systems
- - Automatic crystal shifter for maximum service life
- - Rugged design & air-sealed housing
- - Real cw with excellent beam properties
- - Closed-loop operation to control and adjust output power
- - Low noise
- - Single-frequency operation
- - Low maintenance requirements
- - Long coherence length
Main Applications
- Raman spectroscopy
- - Lithography
- - Scatterometry
Specifications
Optical Data
| Wavelength | 266 ± 1 nm |
| Nominal Output Power | 200 ± 5 mW |
| Output Power Adjustability | 20 – 220 mW |
| Linewidth | < 300 kHz |
| Coherence Length | > 1000 m |
| Beam Propagation Factor M² | < 1.3, TEM₀₀ |
| Polarisation orientation and purity | vertical, > 100:1 |
| Beam Diameter | 0.6 ± 0.1 mm |
| Beam Divergence | < 0.8 mrad |
| Beam Pointing Stability ⁽²⁾ | < 3 µrad/K, < 3 µrad/h |
| Static Alignment Tolerance ⁽²⁾ | lateral ± 0.25 mm, angular ± 2.5 mrad |
| Power Stability ⁽¹⁾ | < 1 %rms |
| Noise (100 kHz – 10 MHz) | < 1 %rms |
Electrical Data
| Power Consumption Mean (Max) | < 100 W (160 W) |
| Line Voltage for external power supply | 85 - 264 V AC (47-63 Hz) |
| Communication Interfaces | USB / RS232 |
| Safety Features | key switch, interlock |
Miscellaneous
| Warm-up Time (cold starting) | < 15 min |
| Operating Temperature (laser head) | 20 - 35 °C non-condensing |
| Laser Head Dimensions | 91 x 270 x 379 mm³ (H x W x L) |
| Control Unit Dimensions (w/o connectors) | 42 x 165 x 164 mm³ (H x W x L) |
| Laser Head Weight | 14.7 kg |
| Control Unit Weight | 1.0 kg |
Notes
1. After 30 minutes warm-up in the temperature range 20 - 35 °C, temperature change < 1 K/h.
2. Position and angle of static alignment tolerances are specified with regard to laser beam exit.
3. The exit window is equipped with the Manual Window Shifter (MWS) in case of external photo contamination. This laser system is equipped with the Automatic Crystal Shifter (ACS).
(*) Protected by patents: DE102022104383B3, DE102010064382B4, US9429814B2
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