FQCW266-300
FQCW266-300 High Power UV Laser
High-Power 266 nm Laser with 300 mW Output for Maximum Precision
The FQCW266-300 – a high-power UV laser, stands for exceptional stability, efficiency, and longevity in the UV range.
With a central wavelength of 266 nm and an output power of 300 mW, this laser delivers outstanding performance for demanding applications in both industry and research.
Features
- 266 nm
- Continuous Wave
- Single Frequency
- Low Power Noise
- M² < 1.35, TEM₀₀
- Up to 300 mW
- Patented Design ⁽⁵⁾
Main applications
- - Wafer Inspection
- - Lithography
- - UV Optics Testing & Alignment
- - Raman Spectroscopy & Microscopy
- - Writing of Fiber Bragg Gratings
Product advantages
- - 266 nm single-frequency laser
- - Output power up to 300 mW
- - Narrow linewidth < 300 kHz and coherence length > 1,000 m
- - Excellent beam quality (M² < 1.3, divergence < 0.45 mrad)
- - Extremely low intensity noise < 0.2% rms
- - Air-cooled – no water cooling required
- - Typical UV crystal spot lifetime 2,000 hours
- - Automatic Crystal Shifter (ACS) system for long lifetime (up to 16,000 h)
- - Purge unit required only for output window (CDA or N₂)
- - Approved for 24/7 industrial operation
- - Flexible upgrade capability within the platform
Specifications
Optical Data
| Wavelength | 266 ± 0.05 nm |
| Nominal Output Power | 300 mW ± 5 % |
| Output Power Adjustability | 30 mW to 300 mW |
| Line Width | < 300 kHz |
| Beam Propagation Factor M² (average) | < 1.3, TEM₀₀ |
| Beam Propagation Factor M²x (horizontal) | < 1.2, TEM₀₀ |
| Beam Propagation Factor M²y (vertical) | < 1.35, TEM₀₀ |
| Polarization Orientation and Purity | Vertical, > 500:1 |
| Beam Diameter | 1.1 ± 0.3 mm |
| Beam Divergence | < 0.45 mrad |
| Static Alignment Tolerance ⁽¹⁾ | Lateral ± 0.25 mm | Angular ± 2.5 mrad |
| Spot-to-Spot Beam Pointing Variation ⁽²⁾ | ± 225 µrad |
| Power Stability (0.5 Hz over 8 h) | < 0.2 % rms |
| Power Noise (1 Hz – 100 kHz) | < 1 % rms |
| Power Noise (100 kHz – 250 MHz) | < 0.2 % rms |
Lifetime
| Typical UV Crystal Spot Lifetime | 2,000 hours |
| Typical Lifetime (before First Service) | 16,000 hours |
Electrical Data
| Power Consumption Mean (Max) | < 200 W (450 W) |
| Line Voltage | 90 to 250 V AC (50 to 60 Hz) |
| Communication Interfaces | USB | RS232 | Ethernet |
| Safety Features | Key Switch | Interlock | Electrical Shutter |
Miscellaneous
| Warm-up Time Typical (Max) ⁽³⁾ | 30 min (45 min) |
| Operating Temperature (Laser Head) | 20 °C to 25 °C non-condensing |
| Cooling via Bearing Surface, Required Thermal Resistance ⁽⁴⁾ | 1/40 K/W @ 25 °C | 1/20 K/W @ 20 °C Cooling Surface |
| Laser Head Dimensions | < 120 x 310 x 715 mm³ (H x W x L) |
| Control Unit Dimensions | < 184 x 483 x 411 mm³ (H x W x L) |
| Laser Head Weight | < 36 kg |
| Control Unit Weight | < 12 kg |
Further Requirement
| Purge Supply for Laser Exit Window | Flow 0.5 l/min CDA, SH < 10 PPM or N2 (Purity Grade 5.0 “Scientific” or Better) |
Notes:
(1) Position and angle of static alignment tolerances are specified with regard to laser beam exit.
(2) Refers to adjacent spots on non-linear UV crystal.
(3) Warm-up in the temperature range 20 °C to 25 °C, temperature change < 1 K/h.
(4) Different cooling options (e.g. air flow, water cooling) available upon request.
(5) Protected by patents: DE10339210B4, EP1344105B1, US7027209B2, DE102010064382B4, US9429814B2, DE102012212428B4, US9024247.
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